D.I.S-cover our Expertise
D.I.S Germany GmbH employs experts with many years of experience in physics, mechanical and system engineering, as well as high-precision manufacturing. With this extensive expertise, we focus on delivering cutting-edge solutions in two key areas: vacuum technology and ion beam technology. Through continuous collaboration with our partners in the United States, we ensure that our solutions are at the forefront of innovation and precision.
On the following pages, you will find detailed information, tutorials, recommended publications, and other content related to these technologies. These resources provide you with insights into the scientific principles behind vacuum and ion beam technology.
While our main expertise is concentrated on vacuum and ion beam technologies, our internal knowledge extends across a broader range of related fields. We leverage this comprehensive understanding to provide our clients with highly specialized solutions and expert guidance tailored to their specific needs.
At D.I.S Germany GmbH, we are committed to sharing our expertise to empower our customers with the tools, information and insights necessary to solve complex challenges and achieve optimal results in their projects.
Vacuum Technology
A mandatory precondition of electron and ion beam technology-related components, assemblies and complete facilities is the generation, maintaining and monitoring of vacuum. These systems are a cornerstone in various industrial, research, and scientific applications. The concept of vacuum technology dates to 1657, when Otto von Guericke demonstrated the power of vacuum with his famous Magdeburg hemispheres. This groundbreaking experiment highlighted the significant potential of evacuated environments, laying the foundation for further advancements in vacuum systems.
Today, vacuum systems are integral to many sectors, including:
- Industrial Applications
- Scientific Research
- Electron and Ion Beam Technology
1 | Vacuum Qualities
Interesting facts and figures
In common parlance the term vacuum describes the absence of matter in a defined volume, however, a space completely devoid of matter has not been discovered or generated yet. For many technical applications and the corresponding calculations and simulations, it is sufficient to assume a perfect vacuum.
In electron and ion beam technology such assumptions would lead to great deviations and a grading of vacuum qualities becomes necessary. For this purpose, the absolute pressure is used.
| Vacuum Quality | Absolute Pressure [mbar] | Particle Density [cm⁻³] |
|---|---|---|
| Atmospheric pressure | 1,013.25 | 2.65 × 10¹⁹ |
| Low (rough) vacuum | 1,013.25 –10⁰ | 2.65 × 10¹⁹ – 2.65 × 10¹⁶ |
| Medium (fine) vacuum | 10⁰ – 10⁻³ | 2.65 × 10¹⁶ – 2.65 × 10¹³ |
| High vacuum | 10⁻³ – 10⁻⁸ | 2.65 × 10¹³ – 2.65 × 10⁸ |
| Ultra-high vacuum | 10⁻⁸ – 10⁻¹¹ | 2.65 × 10⁸ – 2.65 × 10⁵ |
| Extreme-high vacuum | < 10⁻¹¹ | < 2.65 × 10⁵ |
The table shows the corresponding classification according to ISO 3529-1:2019. Vacuum Quality Classification (ISO 3529-1:2019)
Irradiation facilities must generally be operated in high or ultra-high vacuum conditions.
Another important parameter connected to the quality of a vacuum is the mean free path (MFP), which describes the average distance travelled by particles without a collision between each other.
If residual gas pressure is mentioned, it generally refers to the composition of the air.
| Gas Type | Partial Pressure [mbar] |
|---|---|
| Nitrogen | 781.80 |
| Oxygen | 209.70 |
| Water vapour | 12.00 |
| Argon | 9.34 |
| Carbon dioxide | 3.30 × 10⁻¹ |
| Neon | 1.82 × 10⁻² |
| Helium | 5.23 × 10⁻³ |
| Krypton | 1.15 × 10⁻³ |
| Hydrogen | 4.94 × 10⁻³ |
| Xenon | 8.70 × 10⁻⁵ |
The table provides an overview of the gas composition of the air at 20 °C and 50 % humidity.
2 | Vacuum-suitable Materials
Information about vacuum materials
Components of a vacuum facility must only be made of materials that meet special requirements. One of the most important properties are gas tightness and a low inherent vapour pressure. Otherwise, strong outgassing would occur as soon as the material is exposed to vacuum conditions, which in turn would lead to a contaminated vacuum. Figure 1 illustrates the outgassing rates of different materials after different treatment or process stages.
For that reason mostly stainless steel is used for vacuum exposed components. Aluminium is not as suitable as stainless steel, but has the advantage of a lower density, resulting in a lower mass for the desired component. Copper and viton are generally used for seals and boron nitride or aluminium oxide for insulation purposes.
Materials that should be avoided by all means are rubber, plastics, solder and adhesives. Avoiding these materials often results in increased demands on design and construction.
3 | Working with Vaccuum Facilities
Working with vacuum at a glance
In order to understand a vacuum system fundamentally and design it correctly, a number of factors must be considered.
An important parameter is the vacuum technology design of the system (pumping capacity, system dimensions), which must be taken into account. Furthermore, the flow conditions on the system have to be analysed. A sufficient time interval for outgassing processes of the construction materials should be guaranteed.
The successful operation of vacuum facilities requires high standards and careful handling. The following points touch on the most common sources of error.
- First of all, extreme neatness is of outmost importance. Splinters, other residuals or any kind of grease on the surfaces are not to be tolerated, since this would result in contamination of the vacuum.
- Second, cavities and holes must be avoided because they would act as gas reservoirs and therefore, they reduce pumping efficiency.
- Third, appropriate sealing techniques and materials suited for vacuum conditions need to be applied.
- Finally, as always with complex systems, the error potential is reduced by thinking ahead and careful considerations.
Ion Beam Technology at D.I.S
At D.I.S Germany GmbH, we provide innovative solutions for a wide range of ion beam applications. Our products are designed to support the advancement of research and development, helping to take ion beam technology to the next level.
This page offers an introduction and overview of the physical and technological aspects of ion beam facilities, providing insights into the various components and how they contribute to the success of ion beam applications.
Whether you’re looking to enhance your ion beam technology or explore new applications, D.I.S Germany GmbH is your reliable partner in this specialized field.
D.I.S – Your reliable Partner in Vacuum Technology
At D.I.S Germany GmbH, we offer expert consulting and deep scientific knowledge in vacuum technology to help you optimize your systems. Get in touch with us today to learn how our expertise can support your next project.
Tutorials
Charged Particle Beam Diagnostics |
Wien Filter
Wien filters are analytical elements used for separating charged particle beams by velocity using orthogonally superimposed magnetic and electric fields with low weight and compact size compared to other common systems.
Refer to our tutorial for detailed information and the physical background:
Gas Supplies and Analytics | Introduction of Metal Compounds into Ion Sources
The introduction of metal compounds into ion sources often proves to be a challenge.
Practical experience has shown that the MIVOC (Metal Ions from Volatile Compounds) method can be used successfully in many cases.
Refer to our tutorial for the physical background and comprehensive information:
Recommended Publications
Ion Irradiation Facilities
S.Y. Lee, WSPC, Fourth edition, New Jersey a.o. 2018, ISBN-10 : 9813274786, ISBN-13 : 978- 9813274785
Abstract:
The book is intended to be used as a graduate or senior undergraduate textbook in accelerator physics and science. It can be used as preparatory course material in graduate accelerator physics thesis research.
The text covers historical accelerator development, transverse betatron motion, synchrotron motion, an introduction to linear accelerators, and synchrotron radiation phenomena in low emittance electron storage rings, introduction to special topics such as the free electron laser and the beam-beam interaction. Hamiltonian dynamics is used to understand beam manipulation, instability and nonlinearity. Each section is followed by exercises, which are designed to reinforce the concept discussed and to solve a realistic accelerator design problem.
Frank Hinterberger, Springer Verlag Berlin Heidelberg New York 1997, Print ISBN: 978-3-662-09313-9, Electronic ISBN: 978-3-662-09312-2
Abstract:
Das Buch führt in die verschiedenen Beschleunigertypen und deren Bauelemente ein, um dann ausführlich auf die Ionenoptik mit magnetischen Elementen und elektrostatischen Linsen einzugehen. Weitere Schwerpunkte sind die Bahndynamik der Kreisbeschleuniger einschließlich der transversalen als auch der longitudinalen Bahndynamik sowie Methoden zur Injektion und Extraktion und der Strahlkühlung. Zahlreiche durchgerechnete Beispiele im Text und Übungsaufgaben mit Lösungen dienen der Vertiefung des Stoffes. Das Buch dient als Einführung und Fachbuch für alle, die mit Teilchenbeschleunigern zu tun haben.
John D. Gillaspy (Editor), Nova Science Publishers Inc., Huntington, New York 2001
Abstract:
This book provides and elementary introduction to the field of trapping highly charged ions. The first group of chapters is intended to describe the various sorts of highly charged ion traps: EBIT, EBIS, ECR, Storage Rings and various specialty traps. The authors focus on their own ion trap facilities in order to teach by example. The chapters range in scope from comprehensive reviews to brief introductions.
The second group of chapters is intended to give an overview of the various sorts of scientific research which are presently being carried out with traps for highly charged ions. These chapters not only inform, but also stimulate newcomers to think up fresh ideas. The articles in this second group generally fall into one of three broad categories: atomic structure experiments, ion-surface interactions and precision mass spectrometry.
The third group of chapters is intended to deal with theory and spectroscopic analysis. It provides some of the background material necessary to make sense of observed phenomenology, to allow detailed explanation of experimental data, and to plan further experimentation.
Ion Sources
G. Zschornack, M. Schmidt, and A. Thorn, “Electron beam ion sources”, CERN Yellow Report, vol. CERN-2013-007, pp. 165–201, 2014
Abstract:
Electron beam ion sources (EBISs) are ion sources that work based on the principle of electron impact ionization, allowing the production of very highly charged ions. The ions produced can be extracted as a DC ion beam as well as ion pulses of different time structures. In comparison to most of the other known ion sources, EBISs feature ion beams with very good beam emittances and a low energy spread.
Furthermore, EBISs are excellent sources of photons (X-rays, ultraviolet, extreme ultraviolet, visible light) from highly charged ions. This chapter gives an overview of EBIS physics, the principle of operation, and the known technical solutions. Using examples, the performance of EBISs as well as their applications in various fields of basic research, technology and medicine are discussed.
M. Schmidt, H. Peng, G. Zschornack, and S. Sykora, “A compact electron beam ion source with integrated wien filter providing mass and charge state separated beams of highly charged ions”, Review of Scientific Instruments, vol. 80, no. 6, p. 063301, 2009
Abstract:
A Wien filter was designed for and tested with a room temperature electron beam ion source (EBIS). Xenon charge state spectra up to the charge state Xe46+ were resolved as well as the isotopes of krypton using apertures of different sizes. The complete setup consisting of an EBIS and a Wien filter has a length of less than 1 m substituting a complete classical beamline setup. The Wien filter is equipped with removable permanent magnets. Hence total beam current measurements are possible via simple removal of the permanent magnets. In dependence on the needs of resolution a weak (0.2 T) or a strong (0.5 T) magnets setup can be used.
In this paper the principle of operation and the design of the Wien filter meeting the requirements of an EBIS are briefly discussed. The first ion beam extraction and separation experiments with a Dresden EBIS are presented.
H. Zhang, Science Press Beijing a.o., Springer Berlin a.o. 1999
Abstract:
While dealing with the design and operation of ion sources, this book additionally discusses the physics of ion formation of the various elements with different charge states and charge neutralization. Ion selection and beam diagnostics are equally included, and the presentation of the necessary equations and diagrams for the various parameters makes this a useful handbook for ion sources.
John D. Gillaspy (Editor), Nova Science Publishers Inc., Huntington, New York 2001
Abstract:
This book provides and elementary introduction to the field of trapping highly charged ions. The first group of chapters is intended to describe the various sorts of highly charged ion traps: EBIT, EBIS, ECR, Storage Rings and various specialty traps. The authors focus on their own ion trap facilities in order to teach by example. The chapters range in scope from comprehensive reviews to brief introductions.
The second group of chapters is intended to give an overview of the various sorts of scientific research which are presently being carried out with traps for highly charged ions. These chapters not only inform, but also stimulate newcomers to think up fresh ideas. The articles in this second group generally fall into one of three broad categories: atomic structure experiments, ion-surface interactions and precision mass spectrometry.
The third group of chapters is intended to deal with theory and spectroscopic analysis. It provides some of the background material necessary to make sense of observed phenomenology, to allow detailed explanation of experimental data, and to plan further experimentation.
Charged Particle Beam Optics
Miklos Szilagyi, Plenum Press New York 1988, ISBN 10: 0306427176, ISBN 13: 9780306427176
Abstract:
The book is devoted to electron and ion optics, which is important for particle accelerators , for electron beam devices, spectrometers and for applications in submicrometer lithography. It describes in detail modeling based on analogues between geometrical light optics and the laws of charged particle motion in electric and magnetic fields. The book is recommended for scientists, engineers and students in the fields of electron and ion beam technologies and devices, particle accelerators and semiconductor micro lithography.
Frank Hinterberger, Springer Verlag Berlin Heidelberg New York 1997, Print ISBN: 978-3-662-09313-9, Electronic ISBN: 978-3-662-09312-2
Abstract:
Das Buch führt in die verschiedenen Beschleunigertypen und deren Bauelemente ein, um dann ausführlich auf die Ionenoptik mit magnetischen Elementen und elektrostatischen Linsen einzugehen. Weitere Schwerpunkte sind die Bahndynamik der Kreisbeschleuniger einschließlich der transversalen als auch der longitudinalen Bahndynamik sowie Methoden zur Injektion und Extraktion und der Strahlkühlung. Zahlreiche durchgerechnete Beispiele im Text und Übungsaufgaben mit Lösungen dienen der Vertiefung des Stoffes. Das Buch dient als Einführung und Fachbuch für alle, die mit Teilchenbeschleunigern zu tun haben.
Charged Particle Beam Diagnostics
M. Schmidt, H. Peng, G. Zschornack, and S. Sykora, “A compact electron beam ion source with integrated wien filter providing mass and charge state separated beams of highly charged ions”, Review of Scientific Instruments, vol. 80, no. 6, p. 063301, 2009
Abstract:
A Wien filter was designed for and tested with a room temperature electron beam ion source (EBIS). Xenon charge state spectra up to the charge state Xe46+ were resolved as well as the isotopes of krypton using apertures of different sizes. The complete setup consisting of an EBIS and a Wien filter has a length of less than 1 m substituting a complete classical beamline setup. The Wien filter is equipped with removable permanent magnets. Hence total beam current measurements are possible via simple removal of the permanent magnets. In dependence on the needs of resolution a weak (0.2 T) or a strong (0.5 T) magnets setup can be used.
In this paper the principle of operation and the design of the Wien filter meeting the requirements of an EBIS are briefly discussed. The first ion beam extraction and separation experiments with a Dresden EBIS are presented.