EBIS operation

The drift tubes of the D.I.S electron beam ion source EBIS-C1 can be ramped up to a voltage U of 10 kV and the whole range can be used for generating ions, starting at 10 V. The resulting kinetic energy of the extracted ions depends on that voltage and the charge state q of the…

The electron beam ion source EBIS-C1 can ionize any atom or molecule introduced to the vacuum in a gaseous phase. The use of bottles gas in connection with a gas dosing valve is the easiest method but the introduction of materials which are solid at standard condition is possible via sputtering, high-temperature ovens and the…

Electron beam ion sources have a wide range of use in different research fields. The extracted ion beam can be used for implantation and surface modification experiments. Some applications do not require the extraction of ions, such as fundamental research into (highly charged) ions using spectroscopic methods such as x-ray spectroscopy.