Ion Beam Facilities | Customized and made in Germany https://dis-germany.com/product-categories/ion-irradiation-facilities/ Innovation with Dynamic Integrated Solutions Mon, 23 Mar 2026 17:00:01 +0000 en-US hourly 1 https://wordpress.org/?v=6.9.4 https://dis-germany.com/wp-content/uploads/2025/11/cropped-DIS-Logo-white-on-enzian-blue-32x32.png Ion Beam Facilities | Customized and made in Germany https://dis-germany.com/product-categories/ion-irradiation-facilities/ 32 32 Ion Irradiation Facilities | Type M https://dis-germany.com/products/ion-irradiation-facilities-type-m/ Mon, 10 Nov 2025 11:00:49 +0000 https://dis.moerchen-dev.de/products/ion-irradiation-facilities-type-m/ The compact D.I.S Germany Ion Beam and Implantation Facilities Type-M are based on a versatile Electron Cyclotron Resonance Ion Source (ECRIS), which is equipped with a Wien filter that separates the extracted ion beam by charge and mass.

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Product details

Product number
902-S7-09-00003

Particle separation
Wien Filter

Type of source
ECR (Electron Cyclotron Resonance)

The compact D.I.S Germany Ion Beam and Implantation Facilities Type M are based on a versatile Electron Cyclotron Resonance Ion Source (ECRIS), which is equipped with a Wien filter that separates the extracted ion beam by charge and mass. This product is intended for users in research and development as well as for industrial applications. It provides the irradiation and implantation of ions in samples up to 25 mm in size, with larger sizes available upon request.

Documents

Special features

Download data sheet (PDF)
Type M components on YouTube
Type M particle tracing on YouTube
  • ECRIS with a compact Wien filter for low to intermediate ion beam currents of several hundreds of microamps
  • Facility is offered with horizontal ion beam orientation
  • Vertical ion beam configurations are possible on demand

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]]> Ion Irradiation Facilities | Type L https://dis-germany.com/products/ion-irradiation-facilities-type-l/ Mon, 10 Nov 2025 10:00:49 +0000 https://dis.moerchen-dev.de/products/ion-irradiation-facilities-type-l/ The compact D.I.S Germany Ion Irradiation and Implantation Facilities operate a versatile Electron Cyclotron Resonance Ion Source (ECRIS).

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Product details

Type of source
ECR (Electron Cyclotron Resonance)

Particle separation
Dipole

The compact D.I.S Germany Ion Beam and Implantation Facilities operate a versatile Electron Cyclotron Resonance Ion Source (ECRIS). The extracted high-current ion beam is charged and mass analyzed via a magnetic dipole. It can then be used for further applications in either a connected D.I.S. target chamber or a downstream-connected customer beamline.
This product is intended for users in research and development, as well as for industrial applications. It provides ion beams with a current of up to mA.

Special features

Documents

  • ECRIS with a magnetic dipole for ion beam currents up to emA
  • Facility is offered in different ion beam orientation configurations:
    • Horizontal beam guiding
    • Vertical bottom-top beam guiding
    • Vertical top-bottom beam guiding
Download data shet (PDF)

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